Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1989-01-06
1989-09-12
Griffin, Donald A.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
357 51, H01I 506, H01L 2702
Patent
active
048665673
ABSTRACT:
A high frequency integrated circuit channel capacitor structure comprised of interdigitated field effect transistor gate electrodes and source/drain regions of minimum dimension and respective common connection. The multiplicity of parallel connected capacitive regions between the polysilicon gate electrode and a channel region in the substrate provide precisely controlled capacitors with exceptionally low resistance. Metallization contacts to the gate polysilicon and source/drain regions at each interleaved pattern, together with minimum channel length dimensions, minimizes the capacitive resistance. A CMOS configuration is also feasible.
REFERENCES:
patent: 3860945 (1975-01-01), Dawson
patent: 4163245 (1979-07-01), Kinoshita
patent: 4416049 (1983-11-01), McElroy
patent: 4595942 (1986-06-01), Lohstroh
patent: 4772930 (1988-09-01), Anami et al.
Crafts Harold S.
Scaggs Mark Q.
Griffin Donald A.
Hawk Jr. Wilbert
NCR Corporation
Salys Casimer K.
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