Electric heating – Inductive heating – Specific inductor configuration
Patent
1995-05-30
1996-08-27
Leung, Philip H.
Electric heating
Inductive heating
Specific inductor configuration
219638, 219674, 373139, H05B 640, C30B 1320
Patent
active
055503543
ABSTRACT:
A high-frequency induction heating coil is provided which enables a semiconductor single crystal in the process of growth to incorporate impurities uniformly therein, permits ready adjustment of the heat distributing property, and precludes the discharge of electricity across a slit. The high-frequency induction heating coil comprises a pair of annular conductors 21 and 22, a pair of power source terminals 23a and 23b for feeding a high-frequency electric current to the pair of annular conductors 21 and 22, and a plurality of small coils 24a through 24f and 25a through 25f having the pair of annular conductors as opposite electrodes and projecting toward the axis of the pair of annular conductors extending from a first annular conductor 21 to a second annular conductor 22.
REFERENCES:
patent: 2781438 (1957-02-01), Griffith, Jr.
patent: 4506132 (1985-03-01), Keller
patent: 4538279 (1985-08-01), Keller
patent: 5394432 (1995-02-01), Fukuzawa et al.
Kimura Masanori
Yamagishi Hirotoshi
Leung Philip H.
Shin-Etsu Handotai & Co., Ltd.
Snider Ronald R.
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