High-frequency heating device, semiconductor manufacturing...

Details High-frequency heating device, semiconductor manufacturing... High-frequency heating device, semiconductor manufacturing...

2005-09-28

2009-06-30

Paschall, Mark H (Department: 3742)

Electric heating

Metal heating

By arc

C219S121520, C219S121400, C315S111810

Reexamination Certificate

active

07554054

ABSTRACT:
A high-frequency heating device including: a solid-state oscillator that generates a microwave; an amplifier that amplifies the microwave generated by the solid-state oscillator; an isolator that is connected to a stage subsequent to the amplifier and blocks a reflected wave directed from an object exposed with the microwave; an antenna that irradiates the microwave toward the object; and a metal cavity that traps therein the microwave irradiated to the object.

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