High-frequency discharge pumped laser device

Coherent light generators – Particular active media – Gas

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Details

372 38, 372 33, H01S 303

Patent

active

049641360

DESCRIPTION:

BRIEF SUMMARY
TECHNICAL FIELD

The present invention relates to a high-frequency discharge pumped laser device with a high-power output for use in cutting workpieces of metal or the like, and more particularly, to a high-frequency discharge pumped laser device capable of stable high-frequency discharge pumping.


BACKGROUND ART

High-frequency discharge pumped axial-flow lasers are now used for a variety of applications, due to advantages such as a high-power output, high-quality beam, stable oscillation, high-speed control capability and the like.
A conventional axial-flow type high-frequency discharge pumped laser device is illustrated in FIG. 6. In FIG. 6, numeral 1 denotes a discharge tube, which comprises four tube segments in the illustration but may have any desired number of tube segments depending on the output to be produced, and these tube segments may be arranged in parallel or in series with each other; 2 and 3 denote a total reflection mirror and an output mirror, respectively, which are accurately positioned; and 4 denotes an outgoing laser beam. The segments of the discharge tube are provided with inlet and outlet ports connected to a single Roots blower 7, and heat exchangers 5 and 6 are used to cool a laser gas heated by the electric discharge and the compressing action of the Roots blower 7. The laser gas flows in the discharge tube 1 and gas delivery tubes in the directions indicated by the arrows. The gas flows in the discharge tube 1 at the speed of about 100 m/second. Electrodes 8a, 8b to 11a, 11b are connected to respective high-frequency power supplies 12, 13, 14, and 15, and an electric discharge is produced by a high-frequency voltage from the high-frequency power supplies 12 to 15, to generate laser oscillation.
In this type of high-frequency discharge pumped laser device having plural discharge tube segments driven by respective independent high-frequency power supplies, the laser output fluctuates in the cycle of several hertz. This laser output fluctuation is illustrated in FIG. 7, wherein time is indicated along the horizontal axis and the laser output is indicated along the vertical axis. As seen from FIG. 7, a laser output of about 1,000W is subject to an approximately 30W fluctuation.


DISCLOSURE OF THE INVENTION

The object of the present invention is to solve the above-mentioned problems and provide a high-frequency discharge pumped laser device having a reduced output fluctuation and thus capable of stable high-frequency discharge pumping.
To solve the aforementioned problems, the present invention provides a high-frequency discharge pumped laser device for producing a laser oscillation through application of a high-frequency voltage to a discharge tube, comprising respective tube segments, and adjacent tube segments, a potential of the partition wall being maintained at a constant level.
The aforementioned problems are caused by a mutual current produced by a stray capacity between the discharge tube segments, and the influence of the current is eliminated by arranging the partition wall between the tube segments and maintaining the potential of the wall at a constant level.


BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram of an arrangement according to one embodiment of the present invention;
FIG. 2 is a diagram of an arrangement according to another embodiment of the present invention;
FIG. 3 is a conceptual diagram of the first embodiment;
FIG. 4 is an equivalent circuit diagram of FIG. 3;
FIG. 5 is a chart showing a laser output fluctuation according to the present invention;
FIG. 6 is a diagram of a prior art axial-flow type high-frequency discharge pumped laser device;
FIG. 7 is a chart showing a laser output fluctuation according to the prior art high-frequency discharge pumped laser shown in FIG. 6;
FIG. 8 is a diagram for explaining the current flow between discharge tube segment of the prior art device shown in FIG. 6; and
FIG. 9 is an equivalent circuit diagram of FIG. 8.


BEST MODE OF CARRYING OUT THE INVENTION

Embodiments of the present invention will be des

REFERENCES:
patent: 4800567 (1989-01-01), Karube

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