Coherent light generators – Particular pumping means – Electrical
Patent
1988-08-18
1989-12-05
Scott, Jr., Leon
Coherent light generators
Particular pumping means
Electrical
372 88, 372 61, H01S 3097
Patent
active
048857548
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to a high frequency discharge excitation laser device. The device according to the present invention is used, for example, when a laser light is generated for a precise machining of a workpiece.
BACKGROUND ART
In general, a laser device for generating a laser light for precise machining has a structure, such as shown in FIG. 13, which includes a discharge tube 1, electrodes 21 and 22, a high frequency power source circuit 4, a total reflection mirror 71, and a half-mirror 72. A high frequency discharge is generated in a gas 6, such as He, Ne, CO.sub.2 and the like, flowing through a discharge tube 1, and accordingly, a laser light oscillation is generated. The characteristics of the voltage between electrodes V.sub.1 and the laser output W, with regard to the electric current I between electrodes, are shown in FIG. 14. Namely, in accordance with an increase of the current I, the voltage rises from 0 to a point a' corresponding to the discharge starting voltage V.sub.s ' passing through a point e'. Then, when the discharge is started, the voltage suddenly drops to a point b', and subsequently changes along a curve b'-c'. Following the decrease of the current I, the voltage changes along a curve c'-b', passing through point b', and when the voltage reaches point a', rises suddenly to point e' and then falls to point 0.
In correspondence with this change of the voltage V, the characteristics of the laser output W as shown in the lower side of FIG. 14 are obtained. As shown in this characteristic curve of the laser output W, during the reduction of the current I, the laser output becomes extinct at a point d'. Namely, in the characteristic curve of the laser output W, within the range between points d' and e', the laser output can not be controlled by the current I. Therefore, a problem arises in that it is very difficult to obtain a stable control of a laser output when the laser output is low, and thus it is impossible to meet the requirements for a precise machining operation.
DISCLOSURE OF THE INVENTION
An object of the present invention is to provide an improved high frequency discharge excitation laser device in which the above-described problems of the prior art are solved.
In accordance with the present invention, there is provided a high frequency discharge excitation laser device comprising, a discharge tube made of a dielectric material for generating a discharge for laser light oscillation in a gas flowing therethrough; a plurality of main electrodes arranged on the external surface of the discharge tube; and a power source circuit for supplying a high frequency voltage between the main electrodes to generate a laser light oscillation discharge in the discharge tube; characterized in that the laser device further comprises an auxiliary electrode arranged close to the main electrodes on the external surface of the discharge tube, wherein an auxiliary discharge can be generated between the main electrodes and the auxiliary electrode in addition to a main discharge between the main electrodes.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 shows a structure of a high frequency discharge excitation laser device as an embodiment of the present invention;
FIG. 2 is a perspective view showing a portion of the device of FIG. 1;
FIGS. 3(A) and 3(B) are cross-sectional views showing cross-sections of the device of FIG. 1;
FIG. 4 illustrates the characteristics of the voltage and the laser output in a high frequency discharge by the device in FIG. 1;
FIG. 5 illustrates an analysis of the discharge characteristics of the device of FIG. 1;
FIGS. 6 through 14 show various modified embodiments of the present invention; and
FIGS. 15 and 16 illustrate the discharge characteristics of the device of FIG. 1.
BEST MODE OF CARRYING OUT THE INVENTION
The structure of a high frequency discharge excitation laser device according to an embodiment of the present invention is shown in FIG. 1, a perspective view of a portion of the device of FIG. 1 is shown in FIG. 2, and a
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Crockel et al.; Carbon-Dioxide Laser with Power Per Unit Length, Elect. Lett., vol. 5, No. 4, Feb. 20, 1969.
Fanuc Ltd.
Jr. Leon Scott
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