Electric lamp and discharge devices – With positive or negative ion acceleration – Supplying ionizable material
Patent
1989-04-11
1991-01-15
Wieder, Kenneth
Electric lamp and discharge devices
With positive or negative ion acceleration
Supplying ionizable material
250424, 31511191, H01J 2702
Patent
active
049856570
ABSTRACT:
The ion flux obtainable from an otherwise conventional ion source, to project a controlled ion beam at a target contained within an evacuated target chamber, is significantly enhanced by providing a flow of an ionizable gas directly into the ion source canister instead of being supplied into the target chamber. Flux enhancement values exceeding an order of magnitude may thus be obtained with ionizable gases such as argon, helium and neon. The highly enhanced ion flux is particularly advantageous for applications such as sputtering and ion scattering spectroscopy (ISS).
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LK Technologies, Inc.
Wieder Kenneth
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