Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2008-03-04
2008-03-04
Wells, Nikita (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S42300F, C250S426000, C378S119000
Reexamination Certificate
active
10703923
ABSTRACT:
A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between them providing a collimated high density beam of source material for excitation.
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Bergmann, K., Schriever, G., Rosier, O., Muller, M., Neff, W., and Lebert, R., “Highly Repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma”; Applied Optics, Sep. 1, 1999, vol. 38, No. 25, pp. 5413-5417.
Barnett Christopher J.
Klug David R.
Mercer Ian P.
Taylor Alan G.
Johnston Phillip A.
Powerlase Limited
Reinhart Boerner Van Deuren s.c.
Wells Nikita
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