High flux, high energy photon source

Radiant energy – Radiant energy generation and sources – With radiation modifying member

Reexamination Certificate

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Details

C250S42300F, C250S426000, C378S119000

Reexamination Certificate

active

10703923

ABSTRACT:
A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between them providing a collimated high density beam of source material for excitation.

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