High flow-rate leak detector having three molecular filters

Details High flow-rate leak detector having three molecular filters High flow-rate leak detector having three molecular filters

1991-09-05

1993-03-16

Williams, Hezron E.

Measuring and testing

With fluid pressure

Leakage

G01M 302

Patent

active

051933802

ABSTRACT:
A helium leak detector characterized in that it comprises a first molecular pump (T) having a high pumping speed, having its low-pressure outlet connected to an inlet (E) of the detector, and having its high-pressure outlet connected either to a pre-vacuum assembly (10) comprising a first valve (V1) and a first primary pump (P1), or to a measurement assembly (20) for measuring helium pressure and comprising:

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patent: 3592048 (1971-07-01), Maurice et al.
patent: 4472962 (1984-09-01), Mennenga
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patent: 4583394 (1986-04-01), Murakami et al.
patent: 4618855 (1986-10-01), Harding et al.
patent: 4863496 (1989-09-01), Ekiner et al.
patent: 4919599 (1990-04-01), Reich et al.
patent: 5010761 (1991-04-01), Cohen et al.
patent: 5107697 (1992-04-01), Tallon et al.

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