High-flow microvalve

Details High-flow microvalve High-flow microvalve

2006-01-17

2006-01-17

Fox, John (Department: 3753)

Fluid handling

Systems

Multi-way valve unit

C137S625300

Reexamination Certificate

active

06986365

ABSTRACT:
A method for achieving high flow in valves with small actuation distance is described. A detailed description for a silicon microvalve is provided. An algorithm is described for designing optimized valves.

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T. K. Wang et al.; “Production-ready silicon micro valves” Micromachined Devices and Components V, P. J. French and E. Peeters (eds.), pp. 227-237 vol. 3876, SPIE, Bellingham, WA, 1999.
W. Van Der Wijngaart, “A study of orifice-controlled flow for microvalve design optimization”. Designing Microfluidic control components, Ph.D dissertation, Paper #8, Royal Institute of Terminology, Sweden 2002.
A.K. Henning, “Improved Gas Flow Model for Microvalves.” In Proceedings, Transducers '03:2003 Int'l Solid State Sensors and Actuators Conference, pp. 1550-1553 (IEEE Press, Piscataway, NJ, 2003).

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