High efficiency VCSEL and method of fabrication

Details High efficiency VCSEL and method of fabrication High efficiency VCSEL and method of fabrication

1993-06-01

1994-10-25

Epps, Georgia Y.

Coherent light generators

Particular active media

Semiconductor

372 46, 372 96, 372 99, 437129, H01S 319

Patent

active

053596188

ABSTRACT:
A high efficiency vertical cavity surface emitting laser with first and second mirror stacks and an active area sandwiched therebetween. The second mirror stack is formed into a mesa with exposed end surface and outer sidewalls and a centrally located light emission region. A portion of the mesa adjacent the exposed outer sidewalls has a reduced electrical conductance so as to spread operating current from the outer sidewalls into the centrally located light emission region. The electrical conductance of the portion is reduced by oxidizing or etching the outer sidewalls.

REFERENCES:
patent: 4873696 (1989-10-01), Coldren et al.
patent: 4943970 (1990-07-01), Bradley
patent: 5245622 (1993-09-01), Jewell et al.

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