High efficiency laser pattern generator

Optical: systems and elements – Compound lens system – With curved reflective imaging element

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359731, 359208, G02B 2300

Patent

active

060847069

ABSTRACT:
A laser scanner includes an optical relay which reforms an image from a scan lens at a location that provides additional working distance. The optical relay contains primarily reflective elements which provide achromatic focusing for ultraviolet light. One embodiment of the optical relay has a magnifying power of about 1 and use spherical mirrors in a configuration where image distortion and aberrations cancels. A second optical relay provides a reduction in image size using aspherical mirrors such as parabolic and elliptical mirrors. An additional lens cancels distortion and aberration introduced in the second optical relay. The additional working distance allows insertion optical devices such as beamsplitters and chevron correction and autofocus optics in the optical path of the optical relay.

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Jewell et al., "Reflective Systems Design Study for Soft X-ray Projection Lithography," Journal of Vacuum Science and Technology B:8:6:1519-1523 (Nov. 1, 1990).

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