High dielectric constant transition metal oxide materials

Details High dielectric constant transition metal oxide materials High dielectric constant transition metal oxide materials

2007-02-06

2007-02-06

Everhart, Caridad (Department: 2891)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S785000, C257SE21010

Reexamination Certificate

active

10940803

ABSTRACT:
A transition metal oxide dielectric material is doped with a non-metal in order to enhance the electrical properties of the metal oxide. In a preferred embodiment, a transition metal oxide is deposited over a bottom electrode and implanted with a dopant. In a preferred embodiment, the metal oxide is hafnium oxide or zirconium oxide and the dopant is nitrogen. The dopant can convert the crystal structure of the hafnium oxide or zirconium oxide to a tetragonal structure and increase the dielectric constant of the metal oxide.

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