High dielectric constant materials

Details High dielectric constant materials High dielectric constant materials

2008-01-08

2008-01-08

Whitehead, Carl (Department: 2813)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S239000, C438S253000

Reexamination Certificate

active

11031716

ABSTRACT:
A capacitor (10) includes a substrate (12) and two metal electrodes (14, 18). A dielectric layer (16) is formed between the electrodes. Preferably, the dielectric layer has a dielectric constant greater than 25 and an adequate conduction band offset with silicon. Exemplary embodiments proposed use the following material systems: HfuTivTawOxNy, HfuTivOxNy, TiuSrvOxNy, TiuAlvOxNyand HfuSrvOxNy(where u, v, w, x, and y are the atomic proportions of the elements in the dielectric stack).

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