High density static memory cell

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357 23, 357 45, 357 50, 357 51, 357 59, H01L 2702

Patent

active

042465923

ABSTRACT:
A semiconductor memory of the static type employs a pair of cross-coupled driver transistors which are formed by a method which results in field oxide over the source and drain regions of the MOS transistors. Access transistors are formed by a different method and have silicon gates self-aligned with their source and drain diffusions. The load devices are punch-through elements resembling short channel transistors without gates. These features permit a cell layout with a minimum of space used for the cross-coupling connections, and the polysilicon address line can cross over the ground line, producing a very small cell size.

REFERENCES:
patent: 4110776 (1978-09-01), Rao et al.
patent: 4160987 (1979-07-01), Dennard et al.

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