High density plasma surface modification for improving antiwetti

Details High density plasma surface modification for improving antiwetti High density plasma surface modification for improving antiwetti

1997-12-11

2000-10-17

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Polymerization of coating utilizing direct application of...

427127, 427309, 427491, 427535, 427536, 427569, B05D 512

Patent

active

061328138

ABSTRACT:
A method for modifying a substrate surface, including the step of applying a high density plasma to the substrate surface in the presence of a hydrofluorocarbon gas and a carrier gas to form an antiwetting layer on the substrate surface. Optionally, the method including a cleaning step of contacting the slider surface with a carrier gas for a period of time effective to clean the surface.

REFERENCES:
patent: 5661618 (1997-09-01), Brown et al.
patent: 5833871 (1998-11-01), Matsushita et al.

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