High density electrically programmable ROM

Details High density electrically programmable ROM High density electrically programmable ROM

1978-11-02

1981-03-31

Tupman, W. C.

Metal working

Method of mechanical manufacture

Assembling or joining

29577R, 29578, 29591, 357 45, 357 59, B01J 1700

Patent

active

042584663

ABSTRACT:
An electrically programmable memory array of the floating gate type is made by a process which allows the edges of the floating gates to be aligned with the edges of the control gates which also form address lines. Contacts to individual cells are not needed. These factors provide a very small cell size. The source and drain regions are formed prior to applying the first level polysilicon then covered with thick oxide, rather than using the polysilicon as a mask to define the gate areas.

REFERENCES:
patent: 4142926 (1979-03-01), Morgan
patent: 4180826 (1979-12-01), Shappir
patent: 4183040 (1980-01-01), Rideout

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