High density electrically programmable ROM

Static information storage and retrieval – Magnetic bubbles – Guide structure

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Details

357 41, 357 45, 357 54, 357 59, 365185, H01L 2978, H01L 2702, H01L 2710, H01L 2904

Patent

active

043778186

ABSTRACT:
An electrically programmable memory array of the floating gate type is made by a process which allows the edges of the floating gates to be aligned with the edges of the control gates which also form address lines. Contacts to individual cells are not needed. These factors provide a very small cell size. The source and drain regions are formed prior to applying the first level polysilicon then covered with thick oxide, rather than using the polysilicon as a mask to define the gate areas.

REFERENCES:
patent: 4112509 (1978-09-01), Wall
patent: 4151021 (1979-04-01), McElroy
patent: 4326331 (1982-04-01), Guterman

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