High density charge-coupled device imager and method of making t

Electrical pulse counters – pulse dividers – or shift registers: c – Counting or dividing in incremental steps – Beam type tube

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357 30, 357 59, 377 62, H01L 2978, H01L 2714, H01L 3100, G11C 1928

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active

046582789

ABSTRACT:
The present invention relates to a frame transfer charge-coupled device imager which includes along a major surface of a substrate of semiconductor material a photosensing array A-register, a temporary storage B-register and an output C-register. The C-register includes a channel region in the substrate and extending along the substrate surface across the ends of and substantially perpendicular to spaced, parallel channel regions of the B-register. The C-register also includes a plurality of parallel, conductive gates extending transversely across the C-register channel region substantially parallel to the B-register channel regions. The gates include a plurality of sets with a plurality of gates per set. One gate of each set extends to a conductive termination which extends along one side of the C-register channel region over the B-register and the gates of the other sets extend to conductive terminations which are along the side of the C-register channel region opposite the B-register. At least one gate of each set extends over an end portion of a separate one of the B-register channel regions. The end portions of the B-register channel regions are made to extend directly under and be aligned with the gates of the C-register which extend over the channel region.

REFERENCES:
patent: 3911467 (1975-10-01), Levine et al.
patent: 4206371 (1980-06-01), Weimer
patent: 4236830 (1980-12-01), Schlig
patent: 4246591 (1981-01-01), Kosonocky et al.
patent: 4362575 (1982-12-01), Wallace
patent: 4468684 (1984-08-01), Esser et al.

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