Compositions: ceramic – Ceramic compositions – Refractory
Reexamination Certificate
2008-05-20
2008-05-20
Group, Karl E (Department: 1793)
Compositions: ceramic
Ceramic compositions
Refractory
C501S098600
Reexamination Certificate
active
07375045
ABSTRACT:
The present invention provide a high dense aluminum nitride sintered body, a preparing method thereof, and a member for manufacturing semiconductor using the sintered body which has excellent leakage current characteristic, enough adsorbing property, good detachment property and excellent thermal conductivity and so can be applied to even a member for manufacturing semiconductor requiring high volume resistivity like the coulomb type electrostatic chucks as well as the Johnsen-Rahbek type electrostatic chucks.
REFERENCES:
patent: 5457075 (1995-10-01), Fukushima et al.
patent: 2006/0217259 (2006-09-01), Teratani et al.
patent: 2002-220282 (2002-09-01), None
Ahn Hyung Suk
Lee Min-Woo
Lee Sung-Min
Cantor & Colburn LLP
Group Karl E
Komico Ltd.
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