Dynamic magnetic information storage or retrieval – Head – Hall effect
Patent
1997-09-05
2000-09-12
Korzuch, William R.
Dynamic magnetic information storage or retrieval
Head
Hall effect
G11B 539
Patent
active
061186236
ABSTRACT:
A method is provided for making a well-defined, highly-predictable chevron type MR sensor for a read head. A first material is selected for a first gap layer. A selected second material is deposited on the first gap layer followed by a resist frame that has elongated openings exposing elongated top portions of the first gap layer that extend at an acute angle to a head surface of the read head. A selected reactive ion etch (RIE) is employed to etch away the exposed portions of the second material layer down to the first material of the first gap layer. The material of the second material layer is chosen to be etched by the RIE while the material of the first gap layer is chosen not to be etched by the RIE. An example is Al.sub.2 O.sub.3 for the first gap layer, SiO.sub.2 for the second material layer and a RIE that is fluorine based. The resist frame is removed leaving elongated strips of the second material layer extending at the aforementioned angle to the head surface. MR material is then sputtered on top of the first gap layer and on the second material strips building up a MR sensor which has a ribbed structure on each of its first and second surfaces. The resultant MR head has second material strips sandwiched between the first gap layer and the MR sensor.
REFERENCES:
patent: 5515221 (1996-05-01), Gill et al.
patent: 5530608 (1996-06-01), Aboaf et al.
R. W. Arnold et al., "Wear-Reisistant Substrates for MR Heads with Good Thermal Conductivity", IBM Technical Disclosure Bulletin, vol. 22, No. 5, Oct. 1979, pp. 2149-2150.
Fatula, Jr. Joseph John
Hsiao Richard
Inouye Carol Yoshiko
Lee Li-Chung
International Business Machines - Corporation
Johnston Ervin F.
Korzuch William R.
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