Electric lamp or space discharge component or device manufacturi – Process – Electrode making
Patent
1997-01-31
1999-06-29
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
Electrode making
445 50, 313311, H01J 902, H01J 130
Patent
active
059160055
ABSTRACT:
A high curvature diamond field emitter tip fabrication method includes forming on a substrate a diamond film composed of square (100) phase-oriented facets and (111) phase-oriented facets distributed thereabout and columnar diamond particles having defect density differences between the diamond formed beneath the (100) and (111) diamond growth facets, and etching the diamond film using a oxygen-containing gas plasma. Further, the method includes forming on a substrate a diamond film composed of square (100) facets and (111) facets distributed thereabout and columnar diamond particles having defect density differences between the diamond formed beneath the (100) and (111) diamond growth facets, forming a supporting film on the diamond film, removing the substrate therefrom, and etching the diamond film using an oxygen-containing gas plasma after any one of the previously described steps.
REFERENCES:
patent: 5138237 (1992-08-01), Kane et al.
patent: 5289086 (1994-02-01), Kane
patent: 5551903 (1996-09-01), Kumar et al.
patent: 5578901 (1996-11-01), Blanchet-Fincher et al.
Young-Joon Baik, et al., 2nd International Conference on the Applications of Diamond Films and Related Materials, "Effect of Growth Plane Index of Polycrystalline Diamond Film on Raman Spectrum" (1993) pp. 709-714.
Young-Joon Baik, et al., Thin Solid Films, "Texture Formation of Diamond Film Synthesized in the C-H-O System", (1992), pp. 123-131.
Young-Joon Baik, et al., Thin Solid Films, "Habit Modification of Gas Phase Synthesized Diamond Particles in the C-H-O System", (1992), pp. 156-163.
A.A. Morrish, et al., Appl. Phys. Lett., "Effects of Surface Pretreatments on Nucelation and Growth of Diamond Films on a Variety of Substrates", (1991), pp. 417-419.
S. Yugo, et al., Vacuum, "Effects of Electric Field on the Growth of Diamond by Microwave Plasma CVD", (1990), pp. 1364-1367.
W.P. Kang, et al., Application of Diamond Films and Related Materials: Third International Conference, (1995), pp. 37-40.
C.A. Spindt, IEEE Transactions on Electron Devices, "Filed-Emitter Arrays for Vacuum Microelectronics", (1991), pp. 2355-2363.
B.B. Pate, Surface Science, "The Diamond Surface: Atomic and Electronic Structure", (1986), pp. 83-142.
N.S. Xu, et al., J. Phys. D: Appl. Phys., "Similarities in the `Cold` Electron Emission Characteristics of Diamond Coated Molybdenum Electrodes and Polished Bulk Graphite Surface", (1993), pp. 1776-1780.
V.V. Zhirnov, et al., J. Vac. Sci Technol. B, "Field Emission from Silicon Spikes with Diamond Coatings", (1995), pp. 418-421.
Baik Young-Joon
Eun Kwang Yong
Korea Institute of Science and Technology
Ramsey Kenneth J.
LandOfFree
High curvature diamond field emitter tip fabrication method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High curvature diamond field emitter tip fabrication method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High curvature diamond field emitter tip fabrication method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1370478