High current ion source

Details High current ion source High current ion source

1985-02-28

1985-12-31

Anderson, Bruce C.

Radiant energy

Ion generation

Field ionization type

3133551, 3133621, H01J 2700

Patent

active

045623554

ABSTRACT:
A high current ion source for generating ion beams from gases and non-volatile materials which comprises a furnace-cathode unit for generating vapor to be ionized, a major source unit for ionizing the vapor generated in the furnace-cathode chamber and an extraction unit for removing the ions from the major source unit. The three units are removably sealed to each other by vacuum-tight seals. The furnace-cathode unit includes a furnace chamber, the major source unit includes a discharge chamber and the extraction unit a source outlet electrode. Connecting means couple the furnace chamber to the discharge chamber, and suspension means are provided for suspending the components from surrounding flanges.

REFERENCES:
patent: 2782337 (1957-02-01), Robinson
patent: 2824967 (1958-02-01), Kumen
patent: 3371489 (1968-05-01), Eckhardt
patent: 3603089 (1971-09-01), Esker et al.
patent: 3705320 (1972-12-01), Freeman
patent: 4383177 (1983-05-01), Keller et al.

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