Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1985-03-28
1986-07-22
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430141, 430170, 430189, 430193, 430270, 430302, 430326, 534550, 534558, 534560, 534561, G03C 154
Patent
active
046019693
ABSTRACT:
A lithographic resin for use with deep ultraviolet radiation comprises a weakly acidic resin and an alpha phosphoryl substituted diazo carbonyl compound as a sensitizer.
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Regtiz et al., Chem. Ber., 1969, vol. 102, pp. 2216-2229.
Wolter et al., Chem. Ber., 1978, vol. 111, pp. 3068-3085.
Clecak Nicholas J.
Grant Barbara D.
Miller Robert D.
Tompkins Terry C.
Willson Carlton G.
Bowers Jr. Charles L.
International Business Machines - Corporation
Walsh Joseph G.
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