High contrast flatness interferometer

Details High contrast flatness interferometer High contrast flatness interferometer

1981-07-17

1983-09-27

Arnold, Bruce Y.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356352, 356371, G01B 1114, G01B 1130

Patent

active

044065434

ABSTRACT:
Disclosed is an interferometer having an optical flat having a coated reference surface of aluminum whose thickness is in the range of 100-500 A (preferably about 300 A) covered with a coating of silicon dioxide of a thickness in the range of 1,000-10,000 A (preferably about 3,000 A). Such a coating on an optical flat when in engagement with a surface of an object to be tested greatly enhances the contrast of the interference fringes.

REFERENCES:
patent: 3891320 (1975-06-01), Kimura et al.
Born et al., Principles of Optics, Fourth Edition, pp. 323-332, 1970.
Tolansky, S.; Multiple Beam Interferometry, Clarendon Press, Oxford 1958, pp. 8-19.
Twyman, F.; Prism and Lens Making, Hilger and Watts Ltd., 1952, pp. 390-393.
Herriott, D. R. "Multiple-Wavelength Multiple-Beam Interferometric Observation on Flat Surfaces", 51 JOSA10 pp. 1142-1145, Oct. 1961.

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