High conductance water pump

Details High conductance water pump High conductance water pump

1994-10-28

1996-01-16

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

415 90, 417901, B01D 800

Patent

active

054838037

ABSTRACT:
A cryogenically cooled water pump traps water vapor with a high probability but is open to non-condensing gases for high conductance to a turbomolecular pump. The preferred array is a single cylinder, having a length to diameter ratio of between 0.5 and 1, concentric with and near to an ambient temperature conduit. A center baffle, preferably of closed frustoconical shape, may be positioned at the center of the array over the upper bearing plate of the turbomolecular pump where it results in minimal reduction in conductance to the pump.

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