Pumps – Electrical or getter type – Getter heating – vaporizing – or regeneration
Patent
1993-05-11
1994-06-14
Gluck, Richard E.
Pumps
Electrical or getter type
Getter heating, vaporizing, or regeneration
F04B 3702
Patent
active
053204964
ABSTRACT:
An improved high-capacity getter pump, comprising a plurality of porous sintered piled-up annuli made from a non-evaporable getter material and having: i) a first planar surface having a central hole; ii) a second planar surface, having a broader central hole, parallel to said first surface and spaced therefrom by a distance "d" of 1-10.5 mm; iii) a third intermediate planar surface, interposed between said first and second surfaces, spaced from said first surface by a thickness "t" of 0.5-5.0 mm and having a hole coincident with the hole of said first surface; wherein the first surface of a subsequent annulus is in contact with the second surface of a preceding annulus and wherein the first surface of a subsequent annulus is spaced from the third surface of a preceding annulus by a gas conductance having a height "c" of 0.5-10 mm.
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Ferrario Bruno
Manini Paolo
Gluck Richard E.
Murphy David R.
SAES Getters SpA
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