High brightness X-ray metrology

Details High brightness X-ray metrology High brightness X-ray metrology

2011-04-19

2011-04-19

Kiknadze, Irakli (Department: 2882)

X-ray or gamma ray systems or devices

Source

C378S143000, C378S070000

Reexamination Certificate

active

07929667

ABSTRACT:
An x-ray metrology tool having only one x-ray source. The x-ray source includes a liquid metal source for heating and melting at least one metal and producing a liquid metal jet, a liquid metal collector for acquiring the liquid metal jet, a liquid metal circulation system for returning liquid metal from the liquid metal collector to the liquid metal source, and an electron beam source for directing an electron beam at the liquid metal jet anode, thereby producing an incident x-ray beam that is directable towards a sample. A detector receives emissions from the sample in response to the incident x-ray beam, and produces signals indicative of properties of the sample. A controller controls the x-ray source, acquires the signals from the detector, and determines the properties of the sample based at least in part on the signals.

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