High brightness solid electrolyte ion source

Details High brightness solid electrolyte ion source High brightness solid electrolyte ion source

1989-12-22

1991-02-19

Yusko, Donald J.

Electric lamp and discharge devices

With positive or negative ion acceleration

Supplying ionizable material

3133631, 313230, 313336, 250423R, 250423F, H01J 2706

Patent

active

049947117

ABSTRACT:
A solid electrolyte ion source has an emitting tip which is small enough to concentrate an elecric field from an extraction plate and thereby significantly increase the extracted current density compared to prior solid electrolyte sources. The source is heated to a temperature sufficient to induce a thermionic ion emission from the tip. The ion emission can be varied independent of the extraction field by varying the degree of heating, thereby preserving a constant focused ion beam spot size during changes of beam brightness. The tip preferably has a radius in the approximate range of 1-10 microns. The source can be used for ion-microprobe surface analysis and micro-circuit fabrication applications previously unavailable with solid electrolyte sources.

REFERENCES:
patent: 4367429 (1983-01-01), Wang et al.
patent: 4670685 (1987-06-01), Clark, Jr. et al.
patent: 4783595 (1988-11-01), Seidl

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