Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2008-05-27
2008-05-27
West, Jeffrey R. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C702S084000, C702S183000, C702S186000, C702S188000, C709S224000
Reexamination Certificate
active
10967375
ABSTRACT:
The above and other needs are met by an inspection system having a sensor array that is connected to a high speed network connection, and is adapted to provide image data in regard to images of a substrate. A process node is also connected to the high speed network connection, and is adapted to received the image data over the high speed network connection and to analyze the image data to detect anomalies in the images. In this manner, commercially available hardware can be used to construct the inspection system, which thus overcomes many of the problems with expensive, unreliable, and inflexible prior art inspection systems.
REFERENCES:
patent: 7227628 (2007-06-01), Sullivan et al.
patent: 2002/0069369 (2002-06-01), Tremain
Blecher Joseph M.
Hess Carl E.
Huynh Phuong
KLA-Tencor Corporation
Luedeka Neely & Graham P.C.
West Jeffrey R.
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