High bandwidth image transfer

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation

Reexamination Certificate

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Details

C702S084000, C702S183000, C702S186000, C702S188000, C709S224000

Reexamination Certificate

active

07379847

ABSTRACT:
The above and other needs are met by an inspection system having a sensor array that is connected to a high speed network connection, and is adapted to provide image data in regard to images of a substrate. A process node is also connected to the high speed network connection, and is adapted to received the image data over the high speed network connection and to analyze the image data to detect anomalies in the images. In this manner, commercially available hardware can be used to construct the inspection system, which thus overcomes many of the problems with expensive, unreliable, and inflexible prior art inspection systems.

REFERENCES:
patent: 7227628 (2007-06-01), Sullivan et al.
patent: 2002/0069369 (2002-06-01), Tremain

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