High aspect ratio tip atomic force microscopy cantilevers...

Measuring and testing – Surface and cutting edge testing – Roughness

Reexamination Certificate

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Reexamination Certificate

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10905045

ABSTRACT:
The present invention provides a method for the selective growth of single carbon nanotubes (CNT) on the tip apex of a conventional cantilever. Selective CNT growth is established by coating the backside of a cantilever, having a through-hole at a tip apex, with a catalyst material followed by a cover layer. The exposed catalyst at the bottom of the hole at the apex of the cantilever induces growth of a single CNT at this location.

REFERENCES:
patent: 6512235 (2003-01-01), Eitan et al.
patent: 6519221 (2003-02-01), Manalis et al.
patent: 6743408 (2004-06-01), Lieber et al.
Hafner et al., Growth of Nanotubes for Probe Microscopy Tips, Nature, Apr. 29, 1999, p. 761-762, vol. 398.
Hall et al., Simple and Efficient Method for Carbon Nanotube Attachment to Scanning Probes and Other Substrates, Applied Physics Letters, Apr. 2003, p. 2506-2508, 82(15).
Kleckley et al., Letters to the Editor Fabrication of Multilayered Nanotube Probe Tips, Carbon, 2003, p. 833-836, vol. 41.
Katerina Moloni et al., Sharpened Carbon Nanotube Probes, pp. 1-8.

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