High aspect ratio metal microstructures and method for preparing

Stock material or miscellaneous articles – All metal or with adjacent metals – Workpiece with longitudinal passageway or stopweld material

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428923, B21F 2100, B21G 108

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058144145

ABSTRACT:
High aspect ratio metal microstructures may be prepared by a method involving

REFERENCES:
patent: 440694 (1890-11-01), Burdon
patent: 1924734 (1933-08-01), Brown
patent: 4395303 (1983-07-01), Weir
patent: 4687730 (1987-08-01), Eron
patent: 4911981 (1990-03-01), Schnur et al.
patent: 5049382 (1991-09-01), Price et al.
patent: 5079600 (1992-01-01), Schnur et al.
patent: 5096551 (1992-03-01), Schoen, Jr. et al.
patent: 5324591 (1994-06-01), Georger, Jr. et al.
patent: 5342737 (1994-08-01), Georger et al.
patent: 5391463 (1995-02-01), Ligler et al.
patent: 5492696 (1996-02-01), Price et al.
patent: 5510628 (1996-04-01), Georger, Jr. et al.
Elliott, Microlithography Process Technology for IC Fabrication, McGraw H, NY, (1986) pp. 70-87.
J. Calvert et al, Solid State Technology, "New Surface Imaging Techniques for Sub-0.5 Micrometer Optical Lithography", (1991), 34, pp. 77-82.
Reiser, Photoreactive Polymers. The Science and Technology of Resists, Wiley, NY, "X-Ray and Ion Beam Lithographies", pp. 335-359 (1989).
Dressick et al, Proc. MRS Spring 1992 MTG, Paper C8.22, "Selective Electroless Metallization of Patterned Ligand Surfaces".
Calvert et al, Proc. MRS Spring 1992 MTG, Paper C12.3, "Selective Metallization of CVD Diamond Films".
C. Dulcey et al, Science, "Deep UV Photochemistry of Chemisorbed Monolayers: Patterned Coplanar Molecular Assemblies", (1991), 252, pp. 551-554.
Thin Film Processes, Vossen ed., Academic, NY (1978).
C. Shipley, Plating and Surface Finishing, "Historical Highlights of Electroless Plating", (1984), 71, pp. 92-99.
R. Penner et al, Anal. Chem, "Preparation and Electrochemical Characterization of Ultramicroelectrode Ensembles", (1987), 59, pp. 2625-2630.
D. Kirkpatrick et al, J. Appl. Phys, "High Brightness Electrostatically Focused Field Emission Electron Gun for Free Electron Laser Application", (1985), 57, pp. 5011-5016.
A. Nikonov et al, Sov. Phys. Tech. Phys, "Production of Intense Microsecond Electron Beams in a Magnetron Diode", (1987), 32, pp. 50-54.
M. Fleischmann et al, J. Phys. Chem., "The Behavior of Microring Electrodes", (1985), 89, pp. 5537-5541.
R. Saraceno et al, Anal. Chem., "Electron Transfer Reactions of Catechols at Ultrasmall Carbon Ring Electrodes", (1988), 60, pp. 2016-2020.
G. Bekefi et al, J. Appl. Phys., "Temporal Evolution of Beam Emittance from a Field-Emission Electron Gun", (1987), 62, 1564-1567.
D. Kirkaptrick, Fortune, "A Novel Way to Make Vide Screens Flat", (Dec. 1991), p. 132.
D. Kirkpatrick et al, Nuclear Instruments and Methods in Physics Research, "High Brightness Electron Beam Sources for Fel Applications", (1992), A318, pp. 349-352.
D. Kirkpatrick et al, Appl. Phys. Lett., "Analysis of Field Emission from Three-Dimensional Structures", (1992), 60, pp. 2065-2067.
H. Miller, J. Franklin Inst., "Values of the Electron Emmission Functions v(y), t(y), and .THETA.(y) for y>I" (1969), 287, pp. 347-351.
H. Miller, J. Franklin, Inst., "Value of Fowler-Nordheim Field Emission Functions: v(y), t(y), and s(y)", (1966), 282, pp. 382-388.
D. Kirkpatrick et al, Appl. Phys. Lett., "Vacuum Field Emission from a SiTaSi.sub.2 Semiconductor-Metal Eutectic Composite", (1991), 59, pp. 2094-2096.
C. Roberson, A Reprint from the Proceedings, "Bright Electron Beams for Free Electron Lasers", Jun. 26-Jul. 1, 1983, 453, pp. 320-327.
T. Utsumi, IEEE Transactions on Electron Devices, "Keynote Address Vacuum Microelectronics: What's New and Exciting", (1991), 38, pp. 2276-2283.
V. Kulkarni et al, J. Electrochem. Soc., "Patterning of Submicron Metal Features and Pillars in Multilevel Metallization", (1988), 135, pp. 3094-3098.
C. Spindt et al, Journal of Applied Physics, "Physical Properties of Thin-Film Field Emission Cathodes with Molybdenum Cones" (1976), 47, pp. 5248-5263.
D. Kirkpatrick et al, Appl. Phys. Lett., "Demonstration of Vacuum Field Emission from a Self-Assembling Biomolecular Microstructure Composite", (1992), 60, pp. 1556-1558.

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