High aspect ratio containers for ultrahigh purity chemicals

Details High aspect ratio containers for ultrahigh purity chemicals High aspect ratio containers for ultrahigh purity chemicals

1996-11-29

2000-02-29

Jacyna, J. Casimer

Fluent material handling, with receiver or receiver coacting mea

Automatic control of flow cutoff or diversion

Level or overflow responsive

141 95, 141 21, 220612, F17C 1300

Patent

active

060297174

ABSTRACT:
Containers for ultrahigh purity chemicals having aspect ratios of greater than 3:1 and methods of making the same from seamless electropolished stainless steel tubing are described. Chemical delivery systems for semiconductor fabrication processes that utilize these high aspect ratio containers also are described.

REFERENCES:
patent: 2160062 (1939-05-01), Drake et al.
patent: 2536273 (1951-01-01), Gahagan
patent: 2777914 (1957-01-01), Brown
patent: 3081905 (1963-03-01), Schulze et al.
patent: 3731805 (1973-05-01), Schniers
patent: 3826139 (1974-07-01), Bachman
patent: 3930591 (1976-01-01), Hawerkamp
patent: 4056979 (1977-11-01), Bongort et al.
patent: 4064755 (1977-12-01), Bongort et al.
patent: 4134514 (1979-01-01), Schumacher et al.
patent: 4298037 (1981-11-01), Schumacher et al.
patent: 4425949 (1984-01-01), Rowe, Jr.
patent: 4436674 (1984-03-01), McMenamin et al.
patent: 4576552 (1986-03-01), Smith
patent: 4676404 (1987-06-01), Yamazaki et al.
patent: 4859375 (1989-08-01), Lipisko et al.
patent: 4976146 (1990-12-01), Senghass et al.
patent: 4979545 (1990-12-01), Fair
patent: 4979643 (1990-12-01), Lipisko et al.
patent: 5038840 (1991-08-01), Fair
patent: 5041267 (1991-08-01), Randtke et al.
patent: 5069244 (1991-12-01), Miyazaki et al.
patent: 5079950 (1992-01-01), McKieman et al.
patent: 5090212 (1992-02-01), Keltner et al.
patent: 5103673 (1992-04-01), Sawada et al.
patent: 5137063 (1992-08-01), Foster et al.
patent: 5148945 (1992-09-01), Gaetz
patent: 5285812 (1994-02-01), Morales
patent: 5329963 (1994-07-01), Jones et al.
patent: 5465766 (1995-11-01), Siegele et al.
patent: 5479959 (1996-01-01), Stotelmyer et al.
patent: 5562132 (1996-10-01), Siegele et al.
patent: 5590695 (1997-01-01), Siegele et al.
patent: 5607002 (1997-03-01), Siegele et al.
patent: 5628342 (1997-05-01), McNealy et al.
patent: 5676180 (1997-10-01), Teel
B/W Unifloat.RTM. Liquid Level Control systems, New single float/multiple switch level sensing system provides versatile, reliable means of controlling any type of liquid, Brochure by B/W Controls Inc.
Transfil.TM., Chemical Refill System, Brochure by Air Products and Chemicals, Inc. Aug. 1991 Rev. 1, Schumacher.
Announcing A New Era In Liquid Chemical Delivery, Transfil II.TM., Product Brochure by Schumacher (Apr. 1990).,

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