High angular deflection micro-mirror system

Details High angular deflection micro-mirror system High angular deflection micro-mirror system

2006-10-03

2006-10-03

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

Reexamination Certificate

active

07116463

ABSTRACT:
A high angular deflection micro-mirror system including a substrate, a spacer structure extending from the substrate, a deformable membrane supported by the spacer structure, one or more supports located off center on the deformable membrane, and one or more mirrors on the support cantilevered therefrom to achieve a high angular deflection of the mirrors as the deformable membranes deform.

REFERENCES:
patent: 4073567 (1978-02-01), Lakerveld et al.
patent: 4920660 (1990-05-01), Nagasawa et al.
patent: 5202785 (1993-04-01), Nelson
patent: 5351412 (1994-10-01), Furuhata et al.
patent: 5408355 (1995-04-01), Rauch et al.
patent: 5414726 (1995-05-01), Raj et al.
patent: 5434464 (1995-07-01), Bobbio et al.
patent: 5489812 (1996-02-01), Furuhata et al.
patent: 5506175 (1996-04-01), Zhang et al.
patent: 5642015 (1997-06-01), Whitehead et al.
patent: 5726073 (1998-03-01), Zhang et al.
patent: 5867302 (1999-02-01), Fleming
patent: 5960133 (1999-09-01), Tomlinson
patent: 6074890 (2000-06-01), Yao et al.
patent: 6134042 (2000-10-01), Dhuler et al.
patent: 6168395 (2001-01-01), Quenzer et al.
patent: 6178033 (2001-01-01), Ford et al.
patent: 6184608 (2001-02-01), Cabuz et al.
patent: 6215222 (2001-04-01), Hoen
patent: 6236491 (2001-05-01), Goodwin-Johansson
patent: 6253001 (2001-06-01), Hoen
patent: 6256134 (2001-07-01), Dhuler et al.
patent: 6264333 (2001-07-01), Iizuka
patent: 6285504 (2001-09-01), Diemeer
patent: 6400738 (2002-06-01), Tucker et al.
patent: 6466354 (2002-10-01), Gudeman
patent: 6512625 (2003-01-01), Mei et al.
patent: 6529311 (2003-03-01), Bifano et al.
patent: 2002/0167730 (2002-11-01), Needham et al.
patent: 2004/0027671 (2004-02-01), Wu et al.

Affiliated with

Also associated with

Rating

High angular deflection micro-mirror system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High angular deflection micro-mirror system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High angular deflection micro-mirror system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3657480