High actuator density deformable mirror

Details High actuator density deformable mirror High actuator density deformable mirror

1997-12-17

2000-07-04

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310366, 310328, H01L 4108

Patent

active

060843322

ABSTRACT:
An assembly comprises a plurality of thin plate-like members (2,2) arranged in a side-by-side manner. An array (6) of piezoelectric actuators (10,10) is disposed along a portion (5) of each of said actuators. A plurality of leads (34,34) are disposed along each of said plate-like members and each is connected to a respective one of said piezoelectric actuators.

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patent: 5844349 (1998-12-01), Oakley et al.
patent: 5920072 (1999-07-01), Palczewska et al.

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