High accuracy traveling table apparatus

Details High accuracy traveling table apparatus High accuracy traveling table apparatus

1991-05-14

1992-05-19

Henry, Jon W.

Optical: systems and elements

Mirror

With support

359848, 269 73, 269285, 108143, G02B 718, A47B 700

Patent

active

051153548

ABSTRACT:
A high-accuracy traveling table apparatus comprises a workpiece fixing device and a laser mirror for position measurement provided on a table capable of traveling at least in the direction of one axis. The table comprises a mount to which the workpiece fixing device and the laser mirror are fixed and at least one partially coupling member for partially coupling the mount to the table so as to prevent transmission of a distortion of the table to the mount.

REFERENCES:
patent: 4420223 (1983-12-01), Watanabe et al.
patent: 4421386 (1983-12-01), Podgorski
patent: 4492356 (1985-01-01), Taniguchi et al.
J. G. Bednorz et al., "Piezoelectric XY Translator", IBM Tech, Dis. Bull., vol. 26, No. 10A, pp. 4898-4899, Mar. 1984.
J. Aronstein et al., "Frictionless X, Y, Z . . . Table", IBM Tech. Dis. Bull., vol. 15, No.1 2, pp. 3899-3890, May 1973.
C. V. Rabstejnek, "Stepund Repeat . . . Table", IBM Tech. Dis. Bull., vol. 12, No. 11, pp. 1958-1959, Apr. 1970.

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