High-accuracy traveling table apparatus

Details High-accuracy traveling table apparatus High-accuracy traveling table apparatus

1990-06-18

1992-03-31

Henry, Jon W.

Optical: systems and elements

Mirror

With support

359846, 269 73, 269285, 108143, G02B 718, A47B 700

Patent

active

051013010

ABSTRACT:
A high-accuracy traveling table apparatus comprises a workpiece fixing device and a laser mirror for position measurement provided on a table capable of travelling at least in the direction of one axis. The table comprises a mount to which the workpiece fixing device and the laser mirror are fixed and at least one partially coupling member for partially coupling the mount to the table so as to prevent transmission of a distortion of the table to the mount.

REFERENCES:
patent: 4420223 (1983-12-01), Watanabe et al.
patent: 4421386 (1983-12-01), Podgorski
patent: 4492356 (1985-01-01), Taniguchi et al.
patent: 4953965 (1990-09-01), Iwase et al.
J. G. Bednorz et al., "Piezoelectric XY Translator", IBM Tech. Dis. Bull., vol. 26, No. 10A, pp. 4898-4899, Mar. 1984.
C. V. Rabstejnek, "Step and Repeat . . . Table", IBM Tech. Disc. Bull., vol. 12, No. 11, pp. 1958-1959, Apr. 1970.
J. Aronstein et al., "Frictionless X, Y, Z . . . Table", IBM Tech. Dis. Bull. vol. 12, No. 11, pp. 1958-1959, Apr. 1970.

Affiliated with

Also associated with

Rating

High-accuracy traveling table apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High-accuracy traveling table apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High-accuracy traveling table apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2263531