High accuracy structured light profiler

Details High accuracy structured light profiler High accuracy structured light profiler

1988-12-21

1991-01-08

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356 1, G01B 1124

Patent

active

049830430

ABSTRACT:
An optical gauging system for evaluating the surface shape of a workpiece along a particular cross section. The gauging system includes an illumination system which projects a line of light onto the workpiece surface. A viewing system is focused along a line which is illuminated when a workpiece surface is intersected by the line of light. The focused line of the viewing system is imaged onto a linear detector array. A translation mechanism is provided which moves the line of light and the focused line of the viewing system into the workpiece along the plane of the cross section of interest. The relationship between the translation mechanism and the output of the array is related to the profile shape of the workpiece along the cross section of interest.

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