High accuracy, high flexibility, energy beam machining system

Details High accuracy, high flexibility, energy beam machining system High accuracy, high flexibility, energy beam machining system

1991-08-15

1992-12-15

Albritton, C. L.

Electric heating

Metal heating

By arc

21912120, 21912131, B23K 1500

Patent

active

051719649

ABSTRACT:
A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machines the substrate. An electron beam is used in a vacuum chamber in a preferred embodiment. The system also includes an x-y table for positioning the substrate and may have provision for detecting the x-y position and angular misregistration of the substrate. Dynamic forms and stigmator control may be used to produce a uniform beam within the field. The system allows a high speed vector machining process, which optimizes the overall system throughput by minimizing the settling time of the deflection system.

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Digital Computer Applications to Process Control, Van Nauta Lemke, ed. 1977, pp. 655-662 "Computer Numerical Control of Electron Beam Machining Equipments".
Computer Designs Sep. 15, 1987, pp. 87-92.
Multiple OSPs provide speed for digital servo control.
Nuclear Instrum. and Methods in Phys. Res./B B37138 (1989) Feb. (II), No. 2, Amsterdam, NL "New Computer Control Sustem for the High Current Ion Implanter PR-80" pp. 548-551.
Optical Engineering 27(1988) Feb. No. 2, Bellingham, WA, USA pp. 143-149 Electron beam lithography and nanometer structures: fabricator of microzone plates.

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