High accuracy, high flexibility energy beam machining system

Details High accuracy, high flexibility energy beam machining system High accuracy, high flexibility energy beam machining system

1990-07-23

1992-06-23

Albritton, C. L.

Electric heating

Metal heating

By arc

21912120, 21912128, 21912131, 21912132, B23K 1500

Patent

active

051245221

ABSTRACT:
A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machines the substrate. An electron beam is used in a vacuum chamber in a preferred embodiment. The system also includes an x-y table for positioning the substrate and may have provision for detecting the x-y position and angular misregistration of the substrate. Dynamic forms and stigmator control may be used to produce a uniform beam within the field. The system allows a high speed vector machining process, which optimizes the overall system throughput by minimizing the settling time of the deflection system.

REFERENCES:
patent: 4066863 (1978-01-01), Doran et al.
patent: 4710604 (1987-12-01), Shirasu et al.

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