High accuracy beam placement for local area navigation

Details High accuracy beam placement for local area navigation High accuracy beam placement for local area navigation

2009-10-11

2011-11-15

Le, Brian (Department: 2624)

Image analysis

Image transformation or preprocessing

Changing the image coordinates

C382S295000

Reexamination Certificate

active

08059918

ABSTRACT:
An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing. This invention demonstrates a method where high accuracy navigation to the site of interest within a relatively large local area (e.g. an area 200 μm×200 μm) is possible even where the stage
avigation system is not normally capable of such high accuracy navigation. The combination of large area, high-resolution scanning, digital zoom and registration of the image to an idealized coordinate system enables navigation around a local area without relying on stage movements. Once the image is acquired any sample or beam drift will not affect the alignment. Preferred embodiments thus allow accurate navigation to a site on a sample with sub-100 nm accuracy, even without a high-accuracy stage
avigation system.

REFERENCES:
patent: 3326176 (1967-06-01), Sibley
patent: 4393311 (1983-07-01), Feldman et al.
patent: 4451738 (1984-05-01), Smith
patent: 4683378 (1987-07-01), Shimase et al.
patent: 5054097 (1991-10-01), Flinois et al.
patent: 5086230 (1992-02-01), Adachi et al.
patent: 5159643 (1992-10-01), Kaga et al.
patent: 5278408 (1994-01-01), Kakibayashi et al.
patent: 5401972 (1995-03-01), Talbot et al.
patent: 5541411 (1996-07-01), Lindquist et al.
patent: 5905266 (1999-05-01), Larduinat et al.
patent: 7002513 (2006-02-01), Brabec et al.
patent: 7221314 (2007-05-01), Brabec et al.
patent: 7227976 (2007-06-01), Jung et al.
patent: 7351966 (2008-04-01), Marchman et al.
patent: 7442916 (2008-10-01), Lee et al.
patent: 2005/0264445 (2005-12-01), Brabec et al.
patent: 2006/0177120 (2006-08-01), Ghinovker et al.
patent: 2006/0204073 (2006-09-01), Ghinovker et al.
patent: 2008/0061219 (2008-03-01), Lee et al.
patent: 2008/0067369 (2008-03-01), Marchman et al.
patent: 2010042916 (2010-04-01), None

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