Boots – shoes – and leggings
Patent
1993-10-04
1995-10-24
Trammell, James P.
Boots, shoes, and leggings
364468, 395904, 117 85, 505473, G05B 1304
Patent
active
054615593
ABSTRACT:
A multi-featured control system which improves the manufacturing capability of the thin-film semiconductor growth process. This system improves repeatability and accuracy of the process, reduces the manpower requirements to operate MBE, and improves the MBE environment for scientific investigation. This system has three levels of feedback control. The first level improves the precision and tracking of the process variables, flux, and substrate temperature. The second level comprises an expert system that uses sensors to monitor the status of the product in order to tailor the process plan in real time so that the exact qualities desired are achieved. The third level features a continuously evolving neural network model of the process which is used to recommend the recipe and command inputs to achieve a desired goal. The third level is particularly useful during the development process for new materials. All three levels require models of the process which are updated during automatic process identification experiments.
REFERENCES:
patent: 5096533 (1992-03-01), Igarashi
patent: 5122222 (1992-06-01), Turner et al.
patent: 5143896 (1992-09-01), Harada et al.
patent: 5169798 (1992-12-01), Eaglesham et al.
patent: 5185288 (1993-02-01), Cook et al.
patent: 5205900 (1993-04-01), Inoue et al.
patent: 5227363 (1993-07-01), Furukawa et al.
patent: 5364492 (1994-11-01), Eckstein et al.
Currie, K. R. LeClair, S. R. and Pattevon, O. D., "Self-Improving Process Control for Molecular Beam Epitaxy", International Journal of Advanced Manufacturing Technology no date.
Chilton, P. A., Truscott, W. S., Wen, V. F. "Elimination of the Flux Transients from Molecular-Beam Epitaxy Source Cells following Shutter Operation", Journal of Vacuum Science and Technology, B6 (4), Jul./Aug. 1988 pp. 1099-1103.
Vlcek, J. C. Fonstad, C. G. "Precise Computer Control of the MBE Process", Journal of Crystal Growth, vol. III 1991 pp. 55-60.
Patterson, O. D., Qualitative Control of Molecular Beam Epitaxy, Self Directed Control Workshop, WRDC-TR-90-4123 May 1990.
Heyob, Jeffrey J., "The Process Discovery Autotuner", 1991, pp. 1-114.
Adams, Stephen J., "Implementation Of A Robust Algorithm For Comp. Of Shutter Opening Induced Flux Transients For The Molecular Beam Epitaxy Process":, 1993, pp. 1-78.
Patterson O. D., Adams S. J., Garrett P. H., Eyink K. G., LeClair S. R., Heyob J. J., Hunt V., Currie K. R., Haas T. W., "Progress Toward A Compre. Control Sys. For Molecular Beam Epataxy", Aug. 1992, pp. 1-20.
Heyob J. J., "Insitu Process Control Research", 1992, pp. 1-60.
Adams Stephen J.
Currie Kenneth
Haas T. Walter
Heyob Jeffrey J.
Hunt Victor
Franz Bernard E.
Kundert Thomas L.
The United States of America as represented by the Secretary of
Trammell James P.
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