Hidden flexure ultra planar optical routing element

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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Details

C359S223100, C359S295000, C359S298000, C310S333000, C310S364000

Reexamination Certificate

active

07019885

ABSTRACT:
The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus for steering light has a beam layer (160) with a reflective surface. The device uses a multi-layer electrode stack underlying the beam layer to rotate the beam layer into a desired position. Additionally, an underlying rotation and support structure provides a stable platform for the beam layer when the device is activated. In one embodiment, the underlying structure provides a multi-point landing system to maintain a generally flat beam layer upper surface when the device is activated.

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