Coating processes – Direct application of electrical – magnetic – wave – or... – Chemical vapor deposition
Patent
1990-09-13
1993-02-16
Beck, Shrive
Coating processes
Direct application of electrical, magnetic, wave, or...
Chemical vapor deposition
427249, 427314, 427587, 428408, B05D 306, C23C 1626
Patent
active
051869730
ABSTRACT:
A method for depositing a thick, adherent and coherent polycrystalline diamond (PCD) film onto a metallic substrate using a deposition rate of no greater than 0.4 .mu.m per hour. The resulting PCD Film has a smooth surface finish, enhanced crystal orientation in comparision to industrial grade diamond powder particularly in the (220) and (400) directions, and excellent electrical and thermal properties. The method enables one to deposit PCD films having a thickness of at least 12 microns for applications on flat as well as curved substrates having wide use in the electronics industry. Thick PCD films of this invention have been found to be ideal for dissipating heat from radio frequency (RF) and microwave (MW) devices.
REFERENCES:
patent: 4816286 (1989-03-01), Hirose
patent: 4849290 (1989-07-01), Fujimori et al.
patent: 4919974 (1990-04-01), McCune et al.
patent: 4940015 (1990-07-01), Kobashi et al.
Dyer Paul N.
Garg Diwakar
Iampietro Robert L.
Kimock Fred M.
Tsai Wilman
Beck Shrive
Diamonex Incorporated
King Roy V.
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