Hexahydroxybenzophenone sulfonate esters of diazonaphthoquinone

Details Hexahydroxybenzophenone sulfonate esters of diazonaphthoquinone Hexahydroxybenzophenone sulfonate esters of diazonaphthoquinone

1992-07-23

1993-04-27

Cintins, Marianne M.

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazooxide or diazotate

C07C24512, C07C30971

Patent

active

052063488

ABSTRACT:
Positive photoresists formulations for producing positive photoresist images having improved thermal stability yet which allow a wide variation in resin to photoactive sensitizer compound without significant changes in photospeed, thermal behavior, contrast or resolution and with virtually no less in unexposed areas of the photoresist and without significant outgassing or popping are provided by employing novel 1,2-diazonaphthoquinone-4- or -5- sulfonate esters of 2,3,4,3',4',5'-hexahydroxybenzophenone with a novel isomeric distribution of esters. The novel isomeric distribution of 1,2-diazonaphthoquinone-4- or -5- sulfonate esters of 2,3,4,3',4',5'-hexahydroxybenzophenone is characterized by two major isomers, together comprising at least about 70% by weight of the photoactive compound, and wherein the least polar isomer comprises only about 40%.

REFERENCES:
patent: 4863828 (1989-09-01), Kawabe et al.

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