Active solid-state devices (e.g. – transistors – solid-state diode – Gate arrays – With particular power supply distribution means
Patent
1997-04-25
2000-09-05
Mintel, William
Active solid-state devices (e.g., transistors, solid-state diode
Gate arrays
With particular power supply distribution means
257208, 257275, 257374, 257395, 257396, 257397, 257446, 257458, 438424, 333246, 333247, H01L 2980, H01L 31112
Patent
active
061147168
ABSTRACT:
Silicon conductive vias and pedestals are disclosed for use in microwave integrated circuits. The pedestals are isolated from a ground plane on the bottom surface by glass, while the vias are used to make electrical contact to ground. Electrical circuit elements in the top surface of the integrated circuit are selectively grounded or isolated by the choice of connection to a via or pedestal, respectively.
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A New Technology For Si Microwave Power Transistor Manufacturing, XP-002053834, Ping Li, Corp. R&D Center, MA-COM, Inc. Lowell, MA 01853, Timothy Boles, Burlington Semiconductor Operation M/A-COM Inc,, Burlington, MA 01803, pp. 103-106, 1996.
Search Document PCT/US 97/03468, pct international application WO 97/35340.
Boles Timothy Edward
Goodrich Joel Lee
Dinicola Brian K.
Mintel William
The Whitaker Corporation
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