Coating processes – Electrical product produced – Piezoelectric properties
Reexamination Certificate
2007-06-12
2007-06-12
Jolley, Kirsten (Department: 1762)
Coating processes
Electrical product produced
Piezoelectric properties
C427S126300, C427S240000, C427S376200, C427S380000, C427S419300
Reexamination Certificate
active
10738715
ABSTRACT:
Heterolayered thin films having ferroelectric/piezoelectric layers of alternating crystal structures and methods of their preparation are provided. In the ferroelectric/piezoelectric thin film, a first layer has a rhombohedral crystal structure and a second layer adjacent the first layer has a tetragonal crystal structure. The layers have a (100) preferred orientation with α-axis normal to the surface of the film. The first layer can be a Zr-rich lead ziroconate titanate layer (e.g., PbZr0.8Ti0.2O3) and the second layer can be a Ti-rich PZT layer (e.g., PbZr0.2Ti0.8O3). Heterolayered ferroelectric/piezoelectric thin film comprising a plurality of such first and second layers in alternating sequence exhibits particularly improved electrical properties.
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Wang John
Xue Junmin
Zhou Anthony Zhaohui
Jolley Kirsten
Klarquist & Sparkman, LLP
National University of Singapore
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