Heterojunction type compound semiconductor field effect...

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor

Reexamination Certificate

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C257S192000

Reexamination Certificate

active

06936870

ABSTRACT:
A heterojunction type compound semiconductor field effect transistor includes a channel layer, a first electron supply layer, an electric field strength reducing layer, a first contact layer, a recess stopper layer, and a second contact layer sequentially stacked on a compound semiconductor substrate. This transistor has a double recess structure. The first contact layer is composed of GaAs or InGaAs doped with n type impurities with a high electron mobility. The electric field strength reducing layer is composed of intrinsic InGaP.

REFERENCES:
patent: 5504353 (1996-04-01), Kuzuhara
patent: 6534790 (2003-03-01), Kato et al.
patent: 6624440 (2003-09-01), Bito et al.
patent: 7-335867 (1995-12-01), None

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