Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Bipolar transistor
Patent
1993-01-19
1993-10-12
James, Andrew J.
Active solid-state devices (e.g., transistors, solid-state diode
Heterojunction device
Bipolar transistor
257586, 257587, 257577, H01L 29161, H01L 29205, H01L 2972
Patent
active
052528413
ABSTRACT:
The base-collector capacitance in a heterojunction bipolar transistor (HBT) (50) is reduced, thereby providing increased cutoff frequency and power gain, by eliminating a portion of a collector contact layer (54) which normally underlies a base electrode (66). A similar effect may be produced by forming the collector contact layer (54) such that it initially extends into the area (54c) under the base electrode (66), and subsequently rendering the collector contact layer (54) in this area (54c) semiinsulative by proton bombardment. A ballast resistor layer (70) is formed between an emitter layer (62) and an overlying emitter electrode (68) to prevent thermal runaway and hot spot formation. A plurality of the HBTs (50) may be arranged in a distributed amplifier configuration (80) including contact electrode bus lines (84,88) having a geometry designed to provide high thermal efficiency, and input and output circuit matching characteristics.
REFERENCES:
patent: 4380774 (1983-04-01), Yoder
"High-Performance AlGaAs/GaAs HBT's Utilizing Proton-Implanted Buried Layers and Highly Doped Base Layers", Nakajima et al. IEEE Trans on Elect. Dev. Dec. 1987 pp. 2393-2395.
Chu Peter
Wen Cheng P.
Wu Chan S.
Denson-Low W. K.
Grunebach Georgann S.
Gudmestad Terje
Hughes Aircraft Company
James Andrew J.
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