Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1980-08-13
1982-11-02
Rutledge, L. Dewayne
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
148177, 148180, 156612, 156DIG64, 156DIG67, 156DIG105, 357 16, H01L 21228
Patent
active
043571832
ABSTRACT:
A method and apparatus is described for producing Ge or a Ge.sub.1-x Si.sub.x heteroepitaxy film on Si by depositing films of Ge or Ge.sub.1-x Si.sub.x on Si and subjecting the body so formed to a controlled temperature environment, wherein the body is rapidly (within a time period t.sub.o of more than about 100 microseconds) brought to a predetermined temperature within the alloy range of the deposited film but less than the melting point of Si. The body is then held at such temperature for a relatively short time not to exceed about 3 minutes, including the time period t.sub.o.
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Fan John C. C.
Gale Ronald P.
Massachusetts Institute of Technology
Reynolds Leo R.
Rutledge L. Dewayne
Saba W. G.
Smith, Jr. Arthur A.
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